Compound Semiconductor Device Fabrication
The fabrication of Micro- and Nano-technologies devices are today, part of the "Smart solutions" in automotive, biomedical, and electromechanical engineering. Students in taking this device fabrication course will have the opportunity to fabricate a LASER, in the Tyndall National Institute, Training lab. The course allows the student to have a hands-on approach to fabrication of the LASER device and thereby understanding the fundamental principles of a LASER
- Introduction to processing
- Laboratory discipline and safety
- Four high level talks on:
- Materials for Device Processing and key emphasis on compound semiconductor materials.
- The fundamental principles of how a LASER works
- Gallium Nitride LEDs and Detectors
- Silicon v Photonics Processing
- Materials for III-V Devices, Lasers, LEDs and Detectors
- Four process topics:
- Photo-Lithography and device patterning
- Etch of materials
- Metal contacts
- Laboratory sessions on substrate handling, Lithography, PECVD, Etch, Lift-off, Metallization, substrate thinning and device test
- After testing the fabricated lasers, a guided tour about Laser packaging facilities and the III-V material growth systems in Tyndall will be provided to the course participants.
On successful completion of this module, students should be able to:
- Understand the sub-technologies such as; photolithography, etching, metal deposition, thermal treatments and measurement that form the full compound semiconductor device fabrication process.
- Understand the relationship between materials used, process techniques and how these two factors are used to fabricate devices such as semiconductor lasers, LEDs and various detectors.
- Test a simple device and understand the relationship between process parameters and device characteristics.
- Recognise the differences but also see the similarities between silicon IC fabrication and compound semiconductor device fabrication.
Delivery Information5 days Block Delivery
Assessment: Total Marks 100:
- Continuous Assessment 100 marks (Process techniques and session attendance, 60 marks; final report, 40 marks)
- Compulsory Elements: Continuous Assessment